Product Description
Vacuum Pump - 240 VAC - Up to 12" wafer
Recommended for Wafer Sizes: 6", 8", 12"
Vacuum Pump - 240 VAC - Up to 12" wafer - Recommended for Wafer Sizes: 6", 8", 12"
Features
| Pumping Flow Rate | 2.5 l/min |
| Ultimate operating vacuum pressure | -80kPa(-600mmHg) |
| Power Requirement | 240 VAC |
| Power Consumption | 10.0 W |
| Dimensions (D x W x H)mm | 136 x 88 x 129 mm |
| Weight | 1200 g |