Product Description
Vacuum Pump - 110 VAC - Up to 12" wafer
Recommended for Wafer Sizes: 6", 8", 12"
Vacuum Pump - 110 VAC - Up to 12" wafer - Recommended for Wafer Sizes: 6", 8", 12"
Features
Pumping Flow Rate | 2.5 l/min |
Ultimate operating vacuum pressure | -80kPa(-600mmHg) |
Power Requirement | 110 VAC |
Power Consumption | 10.0 W |
Dimensions (D x W x H)mm | 136 x 88 x 129 mm |
Weight | 1200 g |